Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Thin film deposition: fundamentals and modeling

    New search for: Gilmer, G. H.
    New search for: Huang, H.
    New search for: De la Rubia, T. D.
    New search for: Roland, C.
    New search for: De la Rubia, T. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Thin film deposition: fundamentals and modeling

    New search for: Gilmer, G. H.
    New search for: Huang, H.
    New search for: De la Rubia, T. D.
    New search for: Roland, C.
    New search for: De la Rubia, T. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thin film deposition: fundamentals and modeling

    New search for: Gilmer, G. H.
    New search for: Huang, H.
    New search for: De la Rubia, T. D.
    New search for: Roland, C.
    New search for: De la Rubia, T. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thin film deposition: fundamentals and modeling

    Contributors:

    Gilmer, G. H. (author) / Huang, H. (author) / De la Rubia, T. D. (author) / Roland, C. (author) / De la Rubia, T. D.

    Published in:

    Modelling and Simulation in Semiconductor Processing ; 354-380

    COMPUTATIONAL MATERIALS SCIENCE ; 12

    Publication date:

    1998-01-01

    Size:

    27 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Thin Film Shape Memory Alloys : Fundamentals and Device Applications

    Miyazaki, Shuichi ;Fu, Yong Qing ;Huang, Wei Min | UB Braunschweig | 2009

    Thin Film Shape Memory Alloys : Fundamentals and Device Applications

    Miyazaki, Shuichi ;Fu, Yong Qing ;Huang, Wei Min | TIBKAT | 2009

    Thin Film Metal-Oxides : Fundamentals and Applications in Electronics and Energy

    Ramanathan, Shriram | TIBKAT | 2010

    Multiscale Modeling of Thin-Film Deposition: Applications to Si Device Processing

    Baumann, F. H. / Chopp, D. L. / de le Rubia, T. D. et al. | British Library Online Contents | 2001

    ITO THIN FILM DEPOSITION APPARATUS

    LEE GOL HEE / NOH DONG MIN / HEO JEONG | European Patent Office | 2015

    Free access
    Back to top