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An investigation of the properties of silicon oxide prepared by oxidation of silicon in chlorine-containing ambients at 850C
An investigation of the properties of silicon oxide prepared by oxidation of silicon in chlorine-containing ambients at 850C
An investigation of the properties of silicon oxide prepared by oxidation of silicon in chlorine-containing ambients at 850C
MATERIALS LETTERS ; 38 ; 308-312
1999-01-01
5 pages
Article (Journal)
English
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