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    Electrical characterization of copper related defect reactions in silicon

    New search for: Heiser, T.
    New search for: Istratov, A. A.
    New search for: Flink, C.
    New search for: Weber, E. R.
    New search for: Weber, J.
    New search for: Mesli, A.

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    Electrical characterization of copper related defect reactions in silicon

    New search for: Heiser, T.
    New search for: Istratov, A. A.
    New search for: Flink, C.
    New search for: Weber, E. R.
    New search for: Weber, J.
    New search for: Mesli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical characterization of copper related defect reactions in silicon

    New search for: Heiser, T.
    New search for: Istratov, A. A.
    New search for: Flink, C.
    New search for: Weber, E. R.
    New search for: Weber, J.
    New search for: Mesli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrical characterization of copper related defect reactions in silicon

    Contributors:

    Heiser, T. (author) / Istratov, A. A. (author) / Flink, C. (author) / Weber, E. R. (author) / Weber, J. / Mesli, A.

    Published in:

    Symposium A Detects in Snmon Hy[?] ; 149-154

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 58

    Publication date:

    1999-01-01

    Size:

    6 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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