Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B: Fid-Bau Portal

Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B

Park, J.-G. / Jung, J.-K. / Cho, K.-C. / Rozgonyi, G. A.

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Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B

Park, J.-G. / Jung, J.-K. / Cho, K.-C. / Rozgonyi, G. A.

Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B

Park, J.-G. / Jung, J.-K. / Cho, K.-C. / Rozgonyi, G. A.

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Document information

Title:

Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B

Contributors:

Park, J.-G. (author) / Jung, J.-K. (author) / Cho, K.-C. (author) / Rozgonyi, G. A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 1697-1706

Publication date:

1995-01-01

Size:

10 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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