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Patterned surfaces in p-type silicon by photodefined etching

Martins, M. C. / Gamboa, R. M. / Maia Alves, J. / Serra, J. M. / Vallera, A. M.

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Patterned surfaces in p-type silicon by photodefined etching

Martins, M. C. / Gamboa, R. M. / Maia Alves, J. / Serra, J. M. / Vallera, A. M.

Patterned surfaces in p-type silicon by photodefined etching

Martins, M. C. / Gamboa, R. M. / Maia Alves, J. / Serra, J. M. / Vallera, A. M.

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Check availability in my library

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Document information

Title:

Patterned surfaces in p-type silicon by photodefined etching

Contributors:

Martins, M. C. (author) / Gamboa, R. M. (author) / Maia Alves, J. (author) / Serra, J. M. (author) / Vallera, A. M. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.

Published in:

Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 330-334

APPLIED SURFACE SCIENCE ; 138/139

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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