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Lithographically patterned silicon nanostructures on silicon substrates

Megouda, N. / Piret, G. / Galopin, E. / Coffinier, Y. / Hadjersi, T. / Elkechai, O. / Boukherroub, R.

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Lithographically patterned silicon nanostructures on silicon substrates

Megouda, N. / Piret, G. / Galopin, E. / Coffinier, Y. / Hadjersi, T. / Elkechai, O. / Boukherroub, R.

Lithographically patterned silicon nanostructures on silicon substrates

Megouda, N. / Piret, G. / Galopin, E. / Coffinier, Y. / Hadjersi, T. / Elkechai, O. / Boukherroub, R.

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Document information

Title:

Lithographically patterned silicon nanostructures on silicon substrates

Contributors:

Megouda, N. (author) / Piret, G. (author) / Galopin, E. (author) / Coffinier, Y. (author) / Hadjersi, T. (author) / Elkechai, O. (author) / Boukherroub, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 6007-6012

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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