A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Reactive Ion Etching of Silicon Carbide with Patterned Boron Implantation
Reactive Ion Etching of Silicon Carbide with Patterned Boron Implantation
Reactive Ion Etching of Silicon Carbide with Patterned Boron Implantation
Vassilevski, K. V. (author) / Hedley, J. (author) / Horsfall, A. B. (author) / Johnson, C. M. (author) / Wright, N. G. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 925-928
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Reactive Ion Etching Induced Surface Damage of Silicon Carbide
| British Library Online Contents | 2005
Preparation method of reactive sintered boron carbide-silicon carbide composite ceramic material
| European Patent Office | 2015
Method for preparing silicon carbide with ultralow boron content through reactive sintering
| European Patent Office | 2024