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    TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam

    New search for: Obata, K.
    New search for: Sugioka, K.
    New search for: Takai, H.
    New search for: Midorikawa, K.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

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    TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam

    New search for: Obata, K.
    New search for: Sugioka, K.
    New search for: Takai, H.
    New search for: Midorikawa, K.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam

    New search for: Obata, K.
    New search for: Sugioka, K.
    New search for: Takai, H.
    New search for: Midorikawa, K.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam

    Contributors:

    Obata, K. (author) / Sugioka, K. (author) / Takai, H. (author) / Midorikawa, K. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.

    Published in:

    Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 335-339

    APPLIED SURFACE SCIENCE ; 138/139

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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