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TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam
TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam
TiN growth on Si(100) by pulsed laser deposition using homogenized KrF excimer laser beam
Obata, K. (author) / Sugioka, K. (author) / Takai, H. (author) / Midorikawa, K. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.
1999-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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