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The use of liquid precursors in plasmachemical technology of obtaining a-SiC:H thin films
The use of liquid precursors in plasmachemical technology of obtaining a-SiC:H thin films
The use of liquid precursors in plasmachemical technology of obtaining a-SiC:H thin films
Ivashchenko, L. A. (author) / Rusakov, G. V. (author) / Ivashchenko, V. I. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.
1999-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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