Peculiarities of preparing a-SiC:H films from methyltrichlorosilane: Fid-Bau Portal

Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. / Porada, O. K.

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Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. / Porada, O. K.

Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. / Porada, O. K.

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Document information

Title:

Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Contributors:

Rusakov, G. V. (author) / Ivashchenko, L. A. (author) / Ivashchenko, V. I. (author) / Porada, O. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 184 ; 128-134

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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