Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films: Fid-Bau Portal

Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Vasin, A. V. / Rusavsky, A. V. / Nazarov, A. N. / Lysenko, V. S. / Lytvyn, P. M. / Strelchuk, V. V. / Kholostov, K. I. / Bondarenko, V. P. / Starik, S. P.

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Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Vasin, A. V. / Rusavsky, A. V. / Nazarov, A. N. / Lysenko, V. S. / Lytvyn, P. M. / Strelchuk, V. V. / Kholostov, K. I. / Bondarenko, V. P. / Starik, S. P.

Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Vasin, A. V. / Rusavsky, A. V. / Nazarov, A. N. / Lysenko, V. S. / Lytvyn, P. M. / Strelchuk, V. V. / Kholostov, K. I. / Bondarenko, V. P. / Starik, S. P.

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Document information

Title:

Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Contributors:

Vasin, A. V. (author) / Rusavsky, A. V. (author) / Nazarov, A. N. (author) / Lysenko, V. S. (author) / Lytvyn, P. M. (author) / Strelchuk, V. V. (author) / Kholostov, K. I. (author) / Bondarenko, V. P. (author) / Starik, S. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 260 ; 73-76

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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