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    Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

    New search for: Hong, M. H.
    New search for: Lu, Y. F.
    New search for: Ho, T. M.
    New search for: Lu, L. W.
    New search for: Low, T. S.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

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    Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

    New search for: Hong, M. H.
    New search for: Lu, Y. F.
    New search for: Ho, T. M.
    New search for: Lu, L. W.
    New search for: Low, T. S.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

    New search for: Hong, M. H.
    New search for: Lu, Y. F.
    New search for: Ho, T. M.
    New search for: Lu, L. W.
    New search for: Low, T. S.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

    Contributors:

    Hong, M. H. (author) / Lu, Y. F. (author) / Ho, T. M. (author) / Lu, L. W. (author) / Low, T. S. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.

    Published in:

    Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 489-493

    APPLIED SURFACE SCIENCE ; 138/139

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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