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Excimer laser-induced metallization for in situ processing on Si and GaAs

Meunier, M. / Suys, M. / Tabbal, M. / Izquierdo, R.

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Excimer laser-induced metallization for in situ processing on Si and GaAs

Meunier, M. / Suys, M. / Tabbal, M. / Izquierdo, R.

Excimer laser-induced metallization for in situ processing on Si and GaAs

Meunier, M. / Suys, M. / Tabbal, M. / Izquierdo, R.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer laser-induced metallization for in situ processing on Si and GaAs

Contributors:

Meunier, M. (author) / Suys, M. (author) / Tabbal, M. (author) / Izquierdo, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 79/80 ; 208

Publication date:

1994-01-01

Size:

208 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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