Deposition of SiC and AIN thin films by laser ablation: Fid-Bau Portal

Deposition of SiC and AIN thin films by laser ablation

Meinschien, J. / Falk, F. / Hoberr, H. / Stafast, H.

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Deposition of SiC and AIN thin films by laser ablation

Meinschien, J. / Falk, F. / Hoberr, H. / Stafast, H.

Deposition of SiC and AIN thin films by laser ablation

Meinschien, J. / Falk, F. / Hoberr, H. / Stafast, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition of SiC and AIN thin films by laser ablation

Contributors:

Meinschien, J. (author) / Falk, F. (author) / Hoberr, H. (author) / Stafast, H. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.

Published in:

Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 543-548

APPLIED SURFACE SCIENCE ; 138/139

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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