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Deposition of SiC and AIN thin films by laser ablation
Deposition of SiC and AIN thin films by laser ablation
Deposition of SiC and AIN thin films by laser ablation
Meinschien, J. (author) / Falk, F. (author) / Hoberr, H. (author) / Stafast, H. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.
1999-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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