Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures: Fid-Bau Portal

Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures

Rar, A. / Hofmann, S. / Yoshihara, K. / Kajiwara, K.

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Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures

Rar, A. / Hofmann, S. / Yoshihara, K. / Kajiwara, K.

Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures

Rar, A. / Hofmann, S. / Yoshihara, K. / Kajiwara, K.

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Check availability in my library

Order at Subito €

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Document information

Title:

Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures

Contributors:

Rar, A. (author) / Hofmann, S. (author) / Yoshihara, K. (author) / Kajiwara, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 144 ; 310-314

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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