Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles: Fid-Bau Portal

Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles

Kang, H. L. / Lao, J. B. / Li, Z. P. / Yao, W. Q. / Liu, C. / Wang, J. Y.

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Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles

Kang, H. L. / Lao, J. B. / Li, Z. P. / Yao, W. Q. / Liu, C. / Wang, J. Y.

Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles

Kang, H. L. / Lao, J. B. / Li, Z. P. / Yao, W. Q. / Liu, C. / Wang, J. Y.

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Check availability in my library

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Document information

Title:

Reconstruction of GaAs/AlAs supperlattice multilayer structure by quantification of AES and SIMS sputter depth profiles

Contributors:

Kang, H. L. (author) / Lao, J. B. (author) / Li, Z. P. (author) / Yao, W. Q. (author) / Liu, C. (author) / Wang, J. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 388 ; 584-588

Publication date:

2016-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Rar, A. / Hofmann, S. / Yoshihara, K. et al. | British Library Online Contents | 1999

Depth resolution for AES sputter profiles of GaAs/GaInAs strained superlattices

Morais, J. / Fazan, T. A. / Landers, R. | British Library Online Contents | 1993

X-Ray Characterization of LPOMVPE Grown AlAs/GaAs Multilayer

Mogilyanski, D. / Blumin, M. / Gartstein, E. et al. | British Library Online Contents | 2000

D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides

Bersani, M. / Giubertoni, D. / Barozzi, M. et al. | British Library Online Contents | 2003

Influence of non-Gaussian roughness on sputter depth profiles

Liu, Y. / Jian, W. / Wang, J. Y. et al. | British Library Online Contents | 2013