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Formation of pyramids at surface of TMAH etched silicon

Choi, W.K. / Thong, J.T.L. / Luo, P. / Bai, Y. / Tan, C.M. / Chua, T.H.

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Formation of pyramids at surface of TMAH etched silicon

Choi, W.K. / Thong, J.T.L. / Luo, P. / Bai, Y. / Tan, C.M. / Chua, T.H.

Formation of pyramids at surface of TMAH etched silicon

Choi, W.K. / Thong, J.T.L. / Luo, P. / Bai, Y. / Tan, C.M. / Chua, T.H.

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Order at Subito €

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Document information

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Document information

Title:

Formation of pyramids at surface of TMAH etched silicon

Contributors:

Choi, W.K. (author) / Thong, J.T.L. (author) / Luo, P. (author) / Bai, Y. (author) / Tan, C.M. (author) / Chua, T.H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 144 ; 472-475

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Thong, J. T. / Bai, Y. / Luo, P. et al. | British Library Online Contents | 2000

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The pyramids

Fakhry, Ahmed | UB Braunschweig | 1969