Smoothness Control of Wet Etched Si {100} Surfaces in TMAH+Triton: Fid-Bau Portal

Smoothness Control of Wet Etched Si {100} Surfaces in TMAH+Triton

Tang, B. / Yao, M.Q. / Tan, G. / Pal, P. / Sato, K. / Su, W.

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Smoothness Control of Wet Etched Si {100} Surfaces in TMAH+Triton

Tang, B. / Yao, M.Q. / Tan, G. / Pal, P. / Sato, K. / Su, W.

Smoothness Control of Wet Etched Si {100} Surfaces in TMAH+Triton

Tang, B. / Yao, M.Q. / Tan, G. / Pal, P. / Sato, K. / Su, W.

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Check availability in my library

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Document information

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Document information

Title:

Smoothness Control of Wet Etched Si {100} Surfaces in TMAH+Triton

Contributors:

Tang, B. (author) / Yao, M.Q. (author) / Tan, G. (author) / Pal, P. (author) / Sato, K. (author) / Su, W. (author)

Published in:

KEY ENGINEERING MATERIALS ; 609/610 ; 536-541

Publication date:

2014-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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