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Characterization of RuO"2 films prepared by rf reactive magnetron sputtering

Meng, L.-j. / dos Santos, M.P.

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Characterization of RuO"2 films prepared by rf reactive magnetron sputtering

Meng, L.-j. / dos Santos, M.P.

Characterization of RuO"2 films prepared by rf reactive magnetron sputtering

Meng, L.-j. / dos Santos, M.P.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of RuO"2 films prepared by rf reactive magnetron sputtering

Contributors:

Meng, L.-j. (author) / dos Santos, M.P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 147 ; 94-100

Publication date:

1999-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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