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Fabrication and analysis of the nanometer-sized structure of silicon by ultrahigh vacuum field emission transmission electron microscope
Fabrication and analysis of the nanometer-sized structure of silicon by ultrahigh vacuum field emission transmission electron microscope
Fabrication and analysis of the nanometer-sized structure of silicon by ultrahigh vacuum field emission transmission electron microscope
Takeguchi, M. (author) / Tanaka, M. (author) / Furuya, K. (author)
APPLIED SURFACE SCIENCE ; 146 ; 257-261
1999-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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