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KrF excimer laser induced ablation-planarization of GaN surface

Akane, T. / Sugioka, K. / Ogino, H. / Takai, H. / Midorikawa, K.

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KrF excimer laser induced ablation-planarization of GaN surface

Akane, T. / Sugioka, K. / Ogino, H. / Takai, H. / Midorikawa, K.

KrF excimer laser induced ablation-planarization of GaN surface

Akane, T. / Sugioka, K. / Ogino, H. / Takai, H. / Midorikawa, K.

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Check availability in my library

Order at Subito €

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Document information

Title:

KrF excimer laser induced ablation-planarization of GaN surface

Contributors:

Akane, T. (author) / Sugioka, K. (author) / Ogino, H. (author) / Takai, H. (author) / Midorikawa, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 148 ; 133-136

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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