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Excimer laser induced thermal evaporation and ablation of silicon carbide

Reitano, R. / Baeri, P. / Marino, N.

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Excimer laser induced thermal evaporation and ablation of silicon carbide

Reitano, R. / Baeri, P. / Marino, N.

Excimer laser induced thermal evaporation and ablation of silicon carbide

Reitano, R. / Baeri, P. / Marino, N.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer laser induced thermal evaporation and ablation of silicon carbide

Contributors:

Reitano, R. (author) / Baeri, P. (author) / Marino, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 96/98 ; 302-308

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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