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    Annealing and recrystallization of amorphous silicon carbide produced by ion implantation

    New search for: Hofgen, A.
    New search for: Heera, V.
    New search for: Eichhorn, F.
    New search for: Skorupa, W.
    New search for: Moller, W.

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    Annealing and recrystallization of amorphous silicon carbide produced by ion implantation

    New search for: Hofgen, A.
    New search for: Heera, V.
    New search for: Eichhorn, F.
    New search for: Skorupa, W.
    New search for: Moller, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Annealing and recrystallization of amorphous silicon carbide produced by ion implantation

    New search for: Hofgen, A.
    New search for: Heera, V.
    New search for: Eichhorn, F.
    New search for: Skorupa, W.
    New search for: Moller, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Annealing and recrystallization of amorphous silicon carbide produced by ion implantation

    Contributors:

    Hofgen, A. (author) / Heera, V. (author) / Eichhorn, F. (author) / Skorupa, W. (author) / Moller, W. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 353 - 357

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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