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Excimer laser crystallization of amorphous silicon carbide produced by ion implantation

Hedler, A. / Urban, S. / Falk, F. / Hobert, H. / Wesch, W.

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Excimer laser crystallization of amorphous silicon carbide produced by ion implantation

Hedler, A. / Urban, S. / Falk, F. / Hobert, H. / Wesch, W.

Excimer laser crystallization of amorphous silicon carbide produced by ion implantation

Hedler, A. / Urban, S. / Falk, F. / Hobert, H. / Wesch, W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer laser crystallization of amorphous silicon carbide produced by ion implantation

Contributors:

Hedler, A. (author) / Urban, S. (author) / Falk, F. (author) / Hobert, H. (author) / Wesch, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 205 ; 240-248

Publication date:

2003-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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