Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor

Ching Yi Tsai / Desu, S. B. / Chiu, C. C. | British Library Online Contents | 1994

Kinetics of chemical vapor deposition of SiC from methyltrichlorosilane and hydrogen

Lu, C. / Cheng, L. / Zhao, C. et al. | British Library Online Contents | 2009

Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon

Zorman, C. A. / Roy, S. / Wu, C.-H. et al. | British Library Online Contents | 1998

Low pressure chemical vapor deposition of niobium coating on silicon carbide

Liu, Q. / Zhang, L. / Cheng, L. et al. | British Library Online Contents | 2009

Epitaxial nucleation of polycrystalline silicon carbide during chemical vapor deposition

Sheldon, B. W. / Besmann, T. M. / More, K. L. et al. | British Library Online Contents | 1993