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Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor

Ching Yi Tsai / Desu, S. B. / Chiu, C. C.

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Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor

Ching Yi Tsai / Desu, S. B. / Chiu, C. C.

Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor

Ching Yi Tsai / Desu, S. B. / Chiu, C. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor

Contributors:

Ching Yi Tsai (author) / Desu, S. B. (author) / Chiu, C. C. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 104

Publication date:

1994-01-01

Size:

104 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Papasouliotis, G. D. / Sotirchos, S. V. | British Library Online Contents | 1999

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Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. et al. | British Library Online Contents | 2001

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Structural Characterization of 3C-SiC Grown Using Methyltrichlorosilane

Bosi, M. / Attolini, G. / Pecz, B. et al. | British Library Online Contents | 2013