Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition: Fid-Bau Portal

Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Liu, J.-M. / Xu, S.Y. / Zhou, W.Z. / Jiang, X.H. / Ong, C.K. / Lim, L.C.

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Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Liu, J.-M. / Xu, S.Y. / Zhou, W.Z. / Jiang, X.H. / Ong, C.K. / Lim, L.C.

Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Liu, J.-M. / Xu, S.Y. / Zhou, W.Z. / Jiang, X.H. / Ong, C.K. / Lim, L.C.

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Document information

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Document information

Title:

Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Contributors:

Liu, J.-M. (author) / Xu, S.Y. (author) / Zhou, W.Z. (author) / Jiang, X.H. (author) / Ong, C.K. (author) / Lim, L.C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 269 ; 67 - 72

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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