Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition: Fid-Bau Portal

Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

Kukli, K. / Peussa, M. / Johansson, L.-S. / Nykaenen, E. / Niinistoe, L.

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Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

Kukli, K. / Peussa, M. / Johansson, L.-S. / Nykaenen, E. / Niinistoe, L.

Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

Kukli, K. / Peussa, M. / Johansson, L.-S. / Nykaenen, E. / Niinistoe, L.

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Document information

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Document information

Title:

Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

Contributors:

Kukli, K. (author) / Peussa, M. (author) / Johansson, L.-S. (author) / Nykaenen, E. (author) / Niinistoe, L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 315/317 ; 216-221

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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