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Rapid thermal annealing of thin doped and undoped spin-on glass films

Ventura, L. / Slaoui, A. / Muller, J. C. / Siffert, P.

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Rapid thermal annealing of thin doped and undoped spin-on glass films

Ventura, L. / Slaoui, A. / Muller, J. C. / Siffert, P.

Rapid thermal annealing of thin doped and undoped spin-on glass films

Ventura, L. / Slaoui, A. / Muller, J. C. / Siffert, P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Rapid thermal annealing of thin doped and undoped spin-on glass films

Contributors:

Ventura, L. (author) / Slaoui, A. (author) / Muller, J. C. (author) / Siffert, P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 31 ; 319

Publication date:

1995-01-01

Size:

319 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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