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Aluminum metallization for flat-panel displays using ion-beam-assisted physical vapor deposition

Ma, Z. / Was, G. S.

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Aluminum metallization for flat-panel displays using ion-beam-assisted physical vapor deposition

Ma, Z. / Was, G. S.

Aluminum metallization for flat-panel displays using ion-beam-assisted physical vapor deposition

Ma, Z. / Was, G. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Aluminum metallization for flat-panel displays using ion-beam-assisted physical vapor deposition

Contributors:

Ma, Z. (author) / Was, G. S. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 4051-4061

Publication date:

1999-01-01

Size:

11 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Singh, J. | British Library Online Contents | 1996

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Im, J. S. / Chiang, A. | British Library Online Contents | 1996

Advanced Flat-Panel Displays and Materials

Kuo, Y. / Suzuki, K. | British Library Online Contents | 2002

Glass Substrates for Flat Panel Displays

Moffatt, D. M. | British Library Online Contents | 1996

Chemical Vapor Deposition of Copper for Multilevel Metallization

Kaloyeros, A. E. / Fury, M. A. | British Library Online Contents | 1993