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Investigations of Ta film resistors on chemically vapor deposited diamond plates

Zhu, X.-D. / Wang, H. / Zhan, R.-J. / Zhou, H.-Y.

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Investigations of Ta film resistors on chemically vapor deposited diamond plates

Zhu, X.-D. / Wang, H. / Zhan, R.-J. / Zhou, H.-Y.

Investigations of Ta film resistors on chemically vapor deposited diamond plates

Zhu, X.-D. / Wang, H. / Zhan, R.-J. / Zhou, H.-Y.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigations of Ta film resistors on chemically vapor deposited diamond plates

Contributors:

Zhu, X.-D. (author) / Wang, H. (author) / Zhan, R.-J. (author) / Zhou, H.-Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 153 ; 19-22

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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