SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching: Fid-Bau Portal

SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching

Elias, P. / Cambel, V. / Hasenohrl, S. / Hudek, P. / Novak, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching

Elias, P. / Cambel, V. / Hasenohrl, S. / Hudek, P. / Novak, J.

SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching

Elias, P. / Cambel, V. / Hasenohrl, S. / Hudek, P. / Novak, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching

Contributors:

Elias, P. (author) / Cambel, V. (author) / Hasenohrl, S. (author) / Hudek, P. (author) / Novak, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 66 ; 15 - 20

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Gong, Q. / Notzel, R. / Schonherr, H. P. et al. | British Library Online Contents | 2002

Plasma Etching of Patterned Tungsten

Franssila, S. | British Library Online Contents | 1993

Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

Hiller, L. / Stauden, T. / Kemper, R.M. et al. | British Library Online Contents | 2014

HBV deep mesa etching in InGaAs/InAlAs/AlAs heterostructures on InP substrate

Gorska, M. / Wrzesinska, H. / Szerling, A. et al. | British Library Online Contents | 2005

Low Dimensional Structures Prepared by Epitaxial Growth or Regrowth on Patterned Substrates

Eberl, Karl | TIBKAT | 1995