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SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching
SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching
SEM and AFM characterisation of high-mesa patterned InP substrates prepared by wet etching
Elias, P. (Autor:in) / Cambel, V. (Autor:in) / Hasenohrl, S. (Autor:in) / Hudek, P. (Autor:in) / Novak, J. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 66 ; 15 - 20
01.01.1999
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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