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    Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

    New search for: Hiller, L.
    New search for: Stauden, T.
    New search for: Kemper, R.M.
    New search for: Lindner, J.K.N.
    New search for: As, D.J.
    New search for: Pezoldt, J.
    New search for: Okumura, H.
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    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
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    New search for: Funaki, T.
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    Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

    New search for: Hiller, L.
    New search for: Stauden, T.
    New search for: Kemper, R.M.
    New search for: Lindner, J.K.N.
    New search for: As, D.J.
    New search for: Pezoldt, J.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

    New search for: Hiller, L.
    New search for: Stauden, T.
    New search for: Kemper, R.M.
    New search for: Lindner, J.K.N.
    New search for: As, D.J.
    New search for: Pezoldt, J.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

    Contributors:

    Hiller, L. (author) / Stauden, T. (author) / Kemper, R.M. (author) / Lindner, J.K.N. (author) / As, D.J. (author) / Pezoldt, J. (author) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M.

    Published in:

    Silicon Carbide and Related Materials 2013 ; 730-733

    MATERIALS SCIENCE FORUM ; 778/780

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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