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    Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides

    New search for: Kawase, K.
    New search for: Tanimura, J.
    New search for: Kurokawa, H.
    New search for: Kobayashi, K.
    New search for: Teramoto, A.
    New search for: Ogata, T.
    New search for: Inoue, M.

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    Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides

    New search for: Kawase, K.
    New search for: Tanimura, J.
    New search for: Kurokawa, H.
    New search for: Kobayashi, K.
    New search for: Teramoto, A.
    New search for: Ogata, T.
    New search for: Inoue, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides

    New search for: Kawase, K.
    New search for: Tanimura, J.
    New search for: Kurokawa, H.
    New search for: Kobayashi, K.
    New search for: Teramoto, A.
    New search for: Ogata, T.
    New search for: Inoue, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides

    Contributors:

    Kawase, K. (author) / Tanimura, J. (author) / Kurokawa, H. (author) / Kobayashi, K. (author) / Teramoto, A. (author) / Ogata, T. (author) / Inoue, M. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 225-231

    Publication date:

    1999-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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