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Ellipsometric characterization of oxidized porous silicon layer structures

Lohner, T. / Fried, M. / Petrik, P. / Polgar, O. / Gyulai, J. / Lehnert, W.

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Ellipsometric characterization of oxidized porous silicon layer structures

Lohner, T. / Fried, M. / Petrik, P. / Polgar, O. / Gyulai, J. / Lehnert, W.

Ellipsometric characterization of oxidized porous silicon layer structures

Lohner, T. / Fried, M. / Petrik, P. / Polgar, O. / Gyulai, J. / Lehnert, W.

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Check availability in my library

Order at Subito €

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Document information

Title:

Ellipsometric characterization of oxidized porous silicon layer structures

Contributors:

Lohner, T. (author) / Fried, M. (author) / Petrik, P. (author) / Polgar, O. (author) / Gyulai, J. (author) / Lehnert, W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 69-70 ; 182 - 187

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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