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Microcrystalline silicon thin film transistors obtained by hot-wire CVD

Puigdollers, J. / Dosev, D. / Orpella, A. / Voz, C. / Peiro, D. / Bertomeu, J. / Marsal, L.F. / Pallares, J. / Andreu, J. / Alcubilla, R.

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Microcrystalline silicon thin film transistors obtained by hot-wire CVD

Puigdollers, J. / Dosev, D. / Orpella, A. / Voz, C. / Peiro, D. / Bertomeu, J. / Marsal, L.F. / Pallares, J. / Andreu, J. / Alcubilla, R.

Microcrystalline silicon thin film transistors obtained by hot-wire CVD

Puigdollers, J. / Dosev, D. / Orpella, A. / Voz, C. / Peiro, D. / Bertomeu, J. / Marsal, L.F. / Pallares, J. / Andreu, J. / Alcubilla, R.

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Title:

Microcrystalline silicon thin film transistors obtained by hot-wire CVD

Contributors:

Puigdollers, J. (author) / Dosev, D. (author) / Orpella, A. (author) / Voz, C. (author) / Peiro, D. (author) / Bertomeu, J. (author) / Marsal, L.F. (author) / Pallares, J. (author) / Andreu, J. (author) / Alcubilla, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 69-70 ; 526 - 529

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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