The Investigation of Silicon and Boron Carbonitride Films Structure by Diffraction of Synchrotron Radiation: Fid-Bau Portal

The Investigation of Silicon and Boron Carbonitride Films Structure by Diffraction of Synchrotron Radiation

Maximovski, E. A. / Yurjev, G. S. / Kosinova, M. L. / Fainer, N. I. / Rumyantsev, Y. M.

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The Investigation of Silicon and Boron Carbonitride Films Structure by Diffraction of Synchrotron Radiation

Maximovski, E. A. / Yurjev, G. S. / Kosinova, M. L. / Fainer, N. I. / Rumyantsev, Y. M.

The Investigation of Silicon and Boron Carbonitride Films Structure by Diffraction of Synchrotron Radiation

Maximovski, E. A. / Yurjev, G. S. / Kosinova, M. L. / Fainer, N. I. / Rumyantsev, Y. M.

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Document information

Title:

The Investigation of Silicon and Boron Carbonitride Films Structure by Diffraction of Synchrotron Radiation

Contributors:

Maximovski, E. A. (author) / Yurjev, G. S. (author) / Kosinova, M. L. (author) / Fainer, N. I. (author) / Rumyantsev, Y. M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 321/324 ; 230-235

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Brequel, H. / Enzo, S. / Gregori, G. et al. | British Library Online Contents | 2002

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