A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation: Fid-Bau Portal

A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

Fainer, N. I. / Maximovski, E. A. / Kosinova, M. L. / Rumyantsev, Y. M.

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A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

Fainer, N. I. / Maximovski, E. A. / Kosinova, M. L. / Rumyantsev, Y. M.

A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

Fainer, N. I. / Maximovski, E. A. / Kosinova, M. L. / Rumyantsev, Y. M.

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Document information

Title:

A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

Contributors:

Fainer, N. I. (author) / Maximovski, E. A. (author) / Kosinova, M. L. (author) / Rumyantsev, Y. M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 378/381 ; 493-498

Publication date:

2001-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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