Simulation of Al and phosphorus diffusion gettering in Si: Fid-Bau Portal

Simulation of Al and phosphorus diffusion gettering in Si

Kveder, V. / Schroter, W. / Sattler, A. / Seibt, M.

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Simulation of Al and phosphorus diffusion gettering in Si

Kveder, V. / Schroter, W. / Sattler, A. / Seibt, M.

Simulation of Al and phosphorus diffusion gettering in Si

Kveder, V. / Schroter, W. / Sattler, A. / Seibt, M.

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Order at Subito €

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Document information

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Document information

Title:

Simulation of Al and phosphorus diffusion gettering in Si

Contributors:

Kveder, V. (author) / Schroter, W. (author) / Sattler, A. (author) / Seibt, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 175 - 181

Publication date:

2000-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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