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Efficiency of cavity gettering in single and in multicrystalline silicon wafers

Martinuzzi, S. / Henquinet, N.G. / Perichaud, I. / Mathieu, G. / Torregrossa, F.

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Efficiency of cavity gettering in single and in multicrystalline silicon wafers

Martinuzzi, S. / Henquinet, N.G. / Perichaud, I. / Mathieu, G. / Torregrossa, F.

Efficiency of cavity gettering in single and in multicrystalline silicon wafers

Martinuzzi, S. / Henquinet, N.G. / Perichaud, I. / Mathieu, G. / Torregrossa, F.

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Document information

Title:

Efficiency of cavity gettering in single and in multicrystalline silicon wafers

Contributors:

Martinuzzi, S. (author) / Henquinet, N.G. (author) / Perichaud, I. (author) / Mathieu, G. (author) / Torregrossa, F. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 229 - 232

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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