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Influence of Czochralski silicon crystal growth on wafer quality: an extensive investigation using traditional and new characterization techniques
Influence of Czochralski silicon crystal growth on wafer quality: an extensive investigation using traditional and new characterization techniques
Influence of Czochralski silicon crystal growth on wafer quality: an extensive investigation using traditional and new characterization techniques
Porrini, M. (author) / Collareta, P. (author) / Borionetti, G. (author) / Gambaro, D. (author) / Fini, I. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 139 - 144
2000-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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