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    In situ real time ellipsometry monitoring during GaN epilayers processing

    New search for: Losurdo, M.
    New search for: Capezzuto, P.
    New search for: Bruno, G.

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    In situ real time ellipsometry monitoring during GaN epilayers processing

    New search for: Losurdo, M.
    New search for: Capezzuto, P.
    New search for: Bruno, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    In situ real time ellipsometry monitoring during GaN epilayers processing

    New search for: Losurdo, M.
    New search for: Capezzuto, P.
    New search for: Bruno, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    In situ real time ellipsometry monitoring during GaN epilayers processing

    Contributors:

    Losurdo, M. (author) / Capezzuto, P. (author) / Bruno, G. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 59 ; 150 - 154

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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