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Light induced chemical vapour deposition of titanium oxide thin films at room temperature

Halary, E. / Benvenuti, G. / Wagner, F. / Hoffmann, P.

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Light induced chemical vapour deposition of titanium oxide thin films at room temperature

Halary, E. / Benvenuti, G. / Wagner, F. / Hoffmann, P.

Light induced chemical vapour deposition of titanium oxide thin films at room temperature

Halary, E. / Benvenuti, G. / Wagner, F. / Hoffmann, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Light induced chemical vapour deposition of titanium oxide thin films at room temperature

Contributors:

Halary, E. (author) / Benvenuti, G. (author) / Wagner, F. (author) / Hoffmann, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 154-155 ; 146-151

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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