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Process Dependence of Inversion Layer Mobility in 4H-SiC Devices
Process Dependence of Inversion Layer Mobility in 4H-SiC Devices
Process Dependence of Inversion Layer Mobility in 4H-SiC Devices
Alok, D. (author) / Arnold, E. (author) / Egloff, R. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 1077-1080
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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