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Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

Song, X. / Guo, S. / Zorman, C. A. / Wu, C.-H. / Yasseen, A. A. / Mehregany, M.

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Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

Song, X. / Guo, S. / Zorman, C. A. / Wu, C.-H. / Yasseen, A. A. / Mehregany, M.

Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

Song, X. / Guo, S. / Zorman, C. A. / Wu, C.-H. / Yasseen, A. A. / Mehregany, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

Contributors:

Song, X. (author) / Guo, S. (author) / Zorman, C. A. (author) / Wu, C.-H. (author) / Yasseen, A. A. (author) / Mehregany, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1141-1144

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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