Laser micromachining for applications in thin film technology: Fid-Bau Portal

Laser micromachining for applications in thin film technology

Pfleging, W. / Ludwig, A. / Seemann, K. / Preu, R. / Mackel, H. / Glunz, S. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Laser micromachining for applications in thin film technology

Pfleging, W. / Ludwig, A. / Seemann, K. / Preu, R. / Mackel, H. / Glunz, S. W.

Laser micromachining for applications in thin film technology

Pfleging, W. / Ludwig, A. / Seemann, K. / Preu, R. / Mackel, H. / Glunz, S. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Laser micromachining for applications in thin film technology

Contributors:

Pfleging, W. (author) / Ludwig, A. (author) / Seemann, K. (author) / Preu, R. (author) / Mackel, H. (author) / Glunz, S. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 154-155 ; 633-639

Publication date:

2000-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Chauvy, P. F. / Hoffmann, P. / Landolt, D. | British Library Online Contents | 2003

Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

Song, X. / Guo, S. / Zorman, C. A. et al. | British Library Online Contents | 2000

TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics

Davies, S. T. | British Library Online Contents | 2007

Micromachining: technology for the future

Gowri, S. / Ranjith Kumar, P. / Vijayaraj, R. et al. | British Library Online Contents | 2007

Laser micromachining of sputtered DLC films

Fu, Y. Q. / Luo, J. K. / Flewitt, A. J. et al. | British Library Online Contents | 2006