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Single Crystal Growth of 6H-SiC on Saw-Damaged Substrate by Sublimation Method
Single Crystal Growth of 6H-SiC on Saw-Damaged Substrate by Sublimation Method
Single Crystal Growth of 6H-SiC on Saw-Damaged Substrate by Sublimation Method
Okada, S. (author) / Nishiguchi, T. (author) / Shimizu, T. (author) / Sasaki, M. (author) / Oshima, S. (author) / Nishino, S. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 51-54
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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