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Morphology Control for Growth of Thick Epitaxial 4H SiC Layers

Zhang, J. / Ellison, A. / Janzen, E.

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Morphology Control for Growth of Thick Epitaxial 4H SiC Layers

Zhang, J. / Ellison, A. / Janzen, E.

Morphology Control for Growth of Thick Epitaxial 4H SiC Layers

Zhang, J. / Ellison, A. / Janzen, E.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Morphology Control for Growth of Thick Epitaxial 4H SiC Layers

Contributors:

Zhang, J. (author) / Ellison, A. (author) / Janzen, E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 137-140

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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