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Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Wilks, S. P. / Dunstan, P. R. / Wright, C. J. / Pritchard, M. / Pope, G. / Mawby, P. A. / Bowen, W. R.

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Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Wilks, S. P. / Dunstan, P. R. / Wright, C. J. / Pritchard, M. / Pope, G. / Mawby, P. A. / Bowen, W. R.

Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Wilks, S. P. / Dunstan, P. R. / Wright, C. J. / Pritchard, M. / Pope, G. / Mawby, P. A. / Bowen, W. R.

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Document information

Title:

Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Contributors:

Koh, A. (author) / Kestle, A. (author) / Wilks, S. P. (author) / Dunstan, P. R. (author) / Wright, C. J. (author) / Pritchard, M. (author) / Pope, G. (author) / Mawby, P. A. (author) / Bowen, W. R. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 403-406

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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